AVS 56th International Symposium & Exhibition, Session MN-FrM

AVS 56th International Symposium & Exhibition
MEMS and NEMS	Friday Sessions

Session MN-FrM
Multi-scale Interactions of Materials and Fabrication at the Micro- and Nano-scale

Friday, November 13, 2009, 8:20 am, Room B3
Moderator: M. Metzler, Cornell University

Click here to Download program book for this session
in Adobe Acrobat format

Click a paper to see the details. Presenters are shown in bold type.

8:20am	MN-FrM1 Invited Paper Using Nonlinearity to enhance Micro/NanoSensor Performance K. Turner, University of California, Santa Barbara
9:00am	MN-FrM3 High-Q, In-plane Modes of Nanomechanical Resonators Operated in Air P. Waggoner, C. Tan, L. Bellan, H. Craighead, Cornell University
9:20am	MN-FrM4 An Overview of a Simple Fabrication Method for Effective Piezoresistive Transduction of MEMS Resonators J. Cross, B.R. Ilic, Cornell University, M. Zalalutdinov, Global Strategies Group, J. Baldwin, B. Houston, Naval Research Laboratory, H. Craighead, J.M. Parpia, Cornell University
9:40am	MN-FrM5 Determination of Young Modulus and Density of Thin Films using Nanomechanics B.R. Ilic, Cornell University, S.L. Krylov, Tel Aviv University, Israel, H. Craighead, Cornell University
10:00am	MN-FrM6 Parametric Excitation of Microstructures by Direct Mechanical Stiffness Modulation S.L. Krylov, Y. Gerson, Tel Aviv University, Israel, T. Nachmias, U. Keren, Microsystems Design Center, RAFAEL LTD, Israel
10:20am	MN-FrM7 Fabrication of Overhanging Magnet-Tipped Cantilevers for Nanoscale Scanned-Probe Magnetic Resonance J.G. Longenecker, S.A. Hickman, Cornell University, L.E. Harrell, United States Military Academy, J.A. Marohn, Cornell University
10:40am	MN-FrM8 Nanoscale Resonant Mass Sensors Containing Nanofluidic Channels R.A. Barton, B.R. Ilic, S.S. Verbridge, H. Craighead, J.M. Parpia, Cornell University
11:00am	MN-FrM9 Spectroscopic Investigations of XeF₂ Chemistry with Si and Mo Layers on Al Substrate J.-F. Veyan, K. Roodenko, Y. Gogte, University of Texas at Dallas, X.-M. Yan, Qualcomm MEMS Technologies, Inc., Y. Chabal, University of Texas at Dallas
11:20am	MN-FrM10 Cryogenic Inductively Coupled Plasma Etching for Fabrication of Tapered Through-Silicon Vias A. Kamto, The University of Alabama, R. Divan, A.V. Sumant, Argonne National Laboratory, S.L. Burkett, The University of Alabama