AVS 56th International Symposium & Exhibition
    Applied Surface Science Tuesday Sessions
       Session AS-TuP

Paper AS-TuP24
Complete Analysis of Materials using Complementary Techniques

Tuesday, November 10, 2009, 6:00 pm, Room Hall 3

Session: Applied Surface Science Poster Session
Presenter: V.S. Smentkowski, General Electric Global Research
Authors: V.S. Smentkowski, General Electric Global Research
D. Wark, General Electric Global Research
L. Le Tarte, General Electric Global Research
H. Piao, General Electric Global Research
J.C. Chera, General Electric Global Research
S.G. Ostrowski, General Electric Global Research
A. Suzuki, General Electric Global Research
Correspondent: Click to Email
A combination of complimentary analysis techniques has been used to characterize a diffusion couple sample. We will demonstrate that the results, when taken together, provide for a better understanding of the sample than the data from any one technique alone. The poster will summarize how diffusion couples are fabricated and highlight the benefits of each characterization technique. Electron Probe Micro Analysis (EPMA) provides for quantitative chemical analysis (spectrometry and imaging) of most elements (Z>4) at a concentration greater than about 0.1 % within a volume of 1-2 microns. EPMA also allows for imaging of both backscattered and secondary electrons. Auger Electron Spectroscopy ( AES) has the smallest analytical spot, provides for quantitative analysis of all elements (except H and Li) present at concentrations of greater than about 0.5 atomic percent, and can perform high lateral resolution imaging. X-Ray Photoelectron Spectroscopy (XPS) provides for quantitative analysis of all elements (except H and Li) present at concentrations greater than about 0.5 atomic percent, is able to analyze insulating samples, and can provide information regarding the chemical state of the material. Time of Flight Secondary Ion Mass Spectrometry (ToF-SIMS) is able to detect all elements and high mass molecular fragment ions with high sensitivity, is able to analyze non-conductive samples, and the analyst does not need to select which species to analyze for prior to the measurement since a full mass spectrum is saved at every volume element. AES, XPS, and ToF-SIMS surface analysis instruments can operate in spectrometry modes (compositional analysis), imaging modes, as well as depth profiling modes (where one monitors the sample composition as a function of depth).