AVS 55th International Symposium & Exhibition
    Thin Film Tuesday Sessions

Session TF-TuM
Applications of Atomic Layer Deposition

Tuesday, October 21, 2008, 8:00 am, Room 302
Moderator: G.N. Parsons, North Carolina State University


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:00am TF-TuM1 Invited Paper
Atomic Layer Deposition Templating Techniques and Materials for Photonic Crystals
C.J. Summers, Georgia Institute of Technology, E. Graugnard, Rollins College, D. Gaillot, IEMN Laboratoire Central - CNRS, France, J. Blair, Georgia Institute of Technology
8:40am TF-TuM3
Effect of Yb3+ co-Doping on the Luminescent Properties of Er3+:Y2O3 Thin Films
J. Hoang, J.P. Chang, University of California, Los Angeles
9:00am TF-TuM4
Atomic Layer Deposition of Gallium Nitride Using GaCl3 and NH3 Reactants
O.H. Kim, D.J. Kim, T.J. Anderson, University of Florida
9:20am TF-TuM5
Ruthenium and Ruthenium Oxide Thin Films prepared by Atomic Vapor Deposition for MIM Applications
P.K. Baumann, C. Manke, AIXTRON AG, Germany, G. Ruhl, Infineon Technologies AG, Germany, A. Schroeder-Heber, L. Pfitzner, M. Schellenberger, Fraunhofer IISB, Germany
9:40am TF-TuM6
In-Situ FTIR Study of Atomic Layer Deposition of Ruthenium
Y.J. Chabal, S.K. Park, J. Kwon, M. Dai, University of Texas at Dallas, R. Kanjoliab, SAFC Hitech, R. Odedrac, SAFC Hitech Ltd., UK, N. Boagd, University of Salford, UK
10:40am TF-TuM9
Mechanistic Study of Atomic Layer Deposition of Copper
M. Dai, J. Kwon, Rutgers University, S.Y. Park, University of Texas at Dallas, L.S. Wielunski, Rutgers University, Y.J. Chabal, University of Texas at Dallas, Z. Li, R.G. Gordon, Harvard University
11:00am TF-TuM10
Modification of Nonwoven Polymer Fiber Structures by Atomic Layer Deposition
J.C. Spagnola, G.N. Parsons, North Carolina State University
11:20am TF-TuM11
Mechanical and Tribological Property Comparison of Melt-Compounded Nanocomposites of Atomic-Layer-Deposition-Coated Polyamide Particles and Commercial Nanofillers
K.M. Nevalainen, R.J. Suihkonen, Tampere University of Technology, Finland, N.A. Isomäki, Beneq Oy, Finland, C. Hintze, Technical University of Chemnitz, Germany, P.S. Eteläaho, J.E. Vuorinen, P.K. Järvelä, Tampere University of Technology, Finland
11:40am TF-TuM12
Atomic Layer Deposition of Zinc Hybrid Films from Diethyl Zinc and Ethylene Glycol
Q. Peng, R.M. VanGundy, G.K. Hyde, G.N. Parsons, North Carolina State University