AVS 55th International Symposium & Exhibition
    Applied Surface Science Tuesday Sessions

Session AS-TuA
Practical Surface Analysis

Tuesday, October 21, 2008, 1:40 pm, Room 207
Moderator: J. Shallenberger, Evans Analytical Group


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

1:40pm AS-TuA1 Invited Paper
Practical Surface Analysis : Beyond Acquisition - The Human Factors
I.W. Fletcher, S.F. Davies, Intertek MSG, UK
2:20pm AS-TuA3
Characterization of Amine Terminated SAMs: What is with this oxygen?
J.E. Baio, T. Weidner, University of Washington, D.J. Graham, Asemblon, L.J. Gamble, D.G. Castner, University of Washington
2:40pm AS-TuA4
XPS Analyses of Patterned Samples: the Particular Case of X-ray Absorbing Compounds or Structures
C. Cardinaud, IMN-CNRS, France, S. Bouchoule, LPN-CNRS, France, V. Fernandez, IMN-CNRS, France
3:00pm AS-TuA5
Work Function Measurements of W-based Metal Gates by Ultraviolet Photoelectron Spectroscopy and Kelvin Force Microscopy
E. Martinez, F. Pierre, D. Mariolle, N. Benedetto, J.P. Barnes, R. Gassilloud, O. Renault, F. Martin, F. Bertin, A. Chabli, N. Chevalier, CEA-LETI, France
4:00pm AS-TuA8
Assessment of Computer-assist Automated Peak Identification in XPS (X-ray Photoelectron Spectroscopy)
M. Suzuki, ULVAC-PHI, Inc., Japan, S. Fukushima, S. Tanuma, NIMS, Japan
4:20pm AS-TuA9
A Novel Bismuth-Manganese Emitter for G-SIMS Spectroscopy and Imaging
F. Kollmer, ION-TOF GmbH, Germany, F.M. Green, National Physical Laboratory, UK, E. Niehuis, ION-TOF GmbH, Germany, I.S. Gilmore, M.P. Seah, National Physical Laboratory, UK
4:40pm AS-TuA10
Probing the Polymer-Glass Interface to Understand Adhesion in Laminate Structures
K.M. Stika, D.G. Swartzfager, D. Huang, R.L. Smith, D.E. Davidson, R.L. Agostinelli, D. Brill, DuPont
5:00pm AS-TuA11
Process Qualification and Monitoring of Interconnect Etch Processing using In-Line Total Reflective X-ray Fluorescence Spectroscopy
P.S. Frankwicz, M. Johnson, T. Budri, T. Moutinho, National Semiconductor Corporation
5:20pm AS-TuA12
In-situ ATR-UV Spectroscopy of Adsorption-Desorption Isotherms of Silane on Silica
M.A. Bratescu, Nagoya University, Japan, D.B. Allred, University of Washington, N. Saito, Nagoya University, Japan, M. Sarikaya, University of Washington, O. Takai, Nagoya University, Japan