AVS 55th International Symposium & Exhibition | |
Applied Surface Science | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
1:40pm | AS-TuA1 Invited Paper Practical Surface Analysis : Beyond Acquisition - The Human Factors I.W. Fletcher, S.F. Davies, Intertek MSG, UK |
2:20pm | AS-TuA3 Characterization of Amine Terminated SAMs: What is with this oxygen? J.E. Baio, T. Weidner, University of Washington, D.J. Graham, Asemblon, L.J. Gamble, D.G. Castner, University of Washington |
2:40pm | AS-TuA4 XPS Analyses of Patterned Samples: the Particular Case of X-ray Absorbing Compounds or Structures C. Cardinaud, IMN-CNRS, France, S. Bouchoule, LPN-CNRS, France, V. Fernandez, IMN-CNRS, France |
3:00pm | AS-TuA5 Work Function Measurements of W-based Metal Gates by Ultraviolet Photoelectron Spectroscopy and Kelvin Force Microscopy E. Martinez, F. Pierre, D. Mariolle, N. Benedetto, J.P. Barnes, R. Gassilloud, O. Renault, F. Martin, F. Bertin, A. Chabli, N. Chevalier, CEA-LETI, France |
4:00pm | AS-TuA8 Assessment of Computer-assist Automated Peak Identification in XPS (X-ray Photoelectron Spectroscopy) M. Suzuki, ULVAC-PHI, Inc., Japan, S. Fukushima, S. Tanuma, NIMS, Japan |
4:20pm | AS-TuA9 A Novel Bismuth-Manganese Emitter for G-SIMS Spectroscopy and Imaging F. Kollmer, ION-TOF GmbH, Germany, F.M. Green, National Physical Laboratory, UK, E. Niehuis, ION-TOF GmbH, Germany, I.S. Gilmore, M.P. Seah, National Physical Laboratory, UK |
4:40pm | AS-TuA10 Probing the Polymer-Glass Interface to Understand Adhesion in Laminate Structures K.M. Stika, D.G. Swartzfager, D. Huang, R.L. Smith, D.E. Davidson, R.L. Agostinelli, D. Brill, DuPont |
5:00pm | AS-TuA11 Process Qualification and Monitoring of Interconnect Etch Processing using In-Line Total Reflective X-ray Fluorescence Spectroscopy P.S. Frankwicz, M. Johnson, T. Budri, T. Moutinho, National Semiconductor Corporation |
5:20pm | AS-TuA12 In-situ ATR-UV Spectroscopy of Adsorption-Desorption Isotherms of Silane on Silica M.A. Bratescu, Nagoya University, Japan, D.B. Allred, University of Washington, N. Saito, Nagoya University, Japan, M. Sarikaya, University of Washington, O. Takai, Nagoya University, Japan |