Invited Paper VT-TuA3
Vacuum Metrology in Korea, Value Innovation for Customers

Tuesday, October 21, 2008, 2:20 pm, Room 205

The Korea Research Institute of Standards and Science (KRISS) is the National Metrology Institute of Korea and responsible for the establishment, maintenance and dissemination of the national measurement standards. The Vacuum Technology Center (VTC) in KRISS has maintained the vacuum and leak standards from the atmospheric pressure down to 5x10^-7 Pa. The vacuum standards systems for low, high, and ultra-high vacuum have been developed. Through bilateral comparisons with NIST, PTB, NMIJ, NPL (UK), IMGC and CCM key comparison for CCM.P-K3 and CCM.P-K4, it is recognized that the KRISS vacuum standards have reached the top level. In an effort to apply the vacuum and leak standards, VTC drew up and carried out the project “Base Construction for Vacuum Technology” from the year 1999 to 2007. The goal of the project was to establish the center in which almost all kinds of vacuum parts, devices, and equipments can be evaluated and performance tested. Its purpose is to help vacuum industries by providing them technical data needed in their development of vacuum equipments or processes. The next step for VTC is to develop the methods to diagnosis plasma processes in reaction chambers and precursor level and contaminations for advanced vacuum processes like semiconductor and display fabrication.