| AVS 55th International Symposium & Exhibition | |
| Thin Film | Thursday Sessions |
| Session TF-ThA |
| Session: | Thin Films for Displays and Flexible Electronics |
| Presenter: | B. Scherer, GE Global Research |
| Authors: | M. Yan, GE Global Research A.G. Erlat, GE Global Research B. Scherer, GE Global Research P.A. Mcconnelee, GE Global Research A.R. Duggal, GE Global Research T.P. Feist, GE Global Research |
| Correspondent: | Click to Email |
This contribution describes a novel modification to conventional DC magnetron sputtering setup to make highly flexible, conductive and transparent indium tin oxide (ITO) coatings on polymeric films. Such high quality ITO coated polymeric film serves as an ideal substrate for flexible optoelectronic devices such as organic light emitting diodes (OLED), photovoltaics, organic electrochromic devices, and the like. The uniformity and flexibility of ITO coatings on plastic substrates were dramatically improved by inserting a shadow mask between substrate and ITO sputter target and critically positioning the mask to block a spatial region of the sputtering target material from depositing on the substrateIn addition, ITO sputtering process repeatability was improved by preconditioning sputter chamber after cleaning.