| AVS 55th International Symposium & Exhibition | |
| Synchrotron-based Spectroscopy and Spectro-Microscopy Topical Conference | Tuesday Sessions |
| Session SY+SS+BI-TuM |
| Session: | Synchrotron-based Spectroscopy and Spectro-Microscopy |
| Presenter: | M. Merkel, FOCUS GmbH, Germany |
| Authors: | M. Merkel, FOCUS GmbH, Germany J. Rubio-Zuazo, SpLine Spanish CRG Beamline at the European Synchrotron Radiation Facility, France G.R. Castro, SpLine Spanish CRG Beamline at the European Synchrotron Radiation Facility, France M. Escher, FOCUS GmbH, Germany |
| Correspondent: | Click to Email |
Hard X-ray photoelectron spectroscopy (HAXPES) gains momentum as a new non-destructive nanoanalytical method more and more. On one hand the request for non destructive and bulk sensitive analysis methods is highly visible. On the other hand the availability of a number of suitable high energy synchrotron beam lines allows for the realization of such dedicated instrumentations. A new electron analyzer that fulfils the requirements imposed by the XRD and HAXPES techniques is presented. The analyzer of the cylindrical sector type1 in use (FOCUS HV CSA) is a very compact and at the same time highly efficient approach for this kind of electron spectroscopy. It is capable to handle kinetic energies up to 15 keV down to a few eV with the same analyzer setup and power supply.2 The recent implementation of a 2D event counting detector for parallel data acquisition will be described also. By means of this detector the measurement speed is increased to overcome the restrictions imposed by the reduced sample cross sections and analyser transmission at high kinetic energies. Buried layers, as they are common for a number of nanotechnological applications, are invisible with most of the known non destructive analytical methods. To demonstrate the potential of electron spectroscopy at really high kinetic energies we used thin Au layers deposited onto a Cu substrate as a model system for bulk sensitive photoemission. The comparison of the Cu3s and Au5s peaks show the energy dependence of the depth information. It is seen that substrate properties can be probed for kinetic energies ≥ 10 keV effectively. By means of such measurements we derived the energy dependence of the effective attenuation length (EAL) for electrons in Au also. For this purpose core level spectra of different energies are taken for different film thicknesses. The extracted EAL of Au shows an energy dependence of (Ekin)0.622 what is in good agreement with literature data. This work was supported through the Spanish Ministry of Education and Science (MEC), grants nos. FAP-2001-2166 and MAT1999-0241-C01 and the German Ministry of Education and Research (BMBF) under grant no. FKZ 13N9033.
1 Risley J.S, Rev. Sci. Instrum. 43 (1971) 95; Sar-El H.Z, Rev. Sci. Instrum. 38 (1967) 1210; Sar-El H.Z, Rev. Sci. Instrum. 41 (1970) 561.
2 J.R.Rubio-Zuazo, M.Escher, M.Merkel and G.R.Castro, J. of Phys. Conf. Ser. 100 (2008).