| AVS 55th International Symposium & Exhibition | |
| Advanced Surface Engineering | Thursday Sessions |
| Session SE+TF+NC-ThM |
| Session: | Glancing Angle Deposition (GLAD) I |
| Presenter: | C. Patzig, Leibniz-Institute of Surface Modification Leipzig, Germany |
| Authors: | C. Patzig, Leibniz-Institute of Surface Modification Leipzig, Germany T. Karabacak, University of Arkansas at Little Rock B. Fuhrmann, Martin-Luther-University Halle, Germany B. Rauschenbach, Leibniz-Institute of Surface Modification Leipzig, Germany |
| Correspondent: | Click to Email |
When glancing angle deposition is combined with a continuous substrate rotation, the growth of nanostructures with various shapes such as vertical posts, spirals and screws is possible. The shape is controllable with the ratio ρ = r/ω of the deposition rate r to the rotational speed ω. Besides the control of ρ, other deposition parameters such as the deposition angle β between particle flux and substrate normal, or the substrate temperature can be used to alter morphology and density of the grown sculptured thin films. Additionally, the use of a patterned substrate as an array of artificial seeds for the incoming deposition flux can lead to the growth of periodically arranged nanostructures. Here, nano sphere lithography was used to structure Si(100) substrates with Au dots in both hexagonally close packed and honeycomb arrangement as templates for the subsequent glancing angle deposition that was done by ion beam sputter deposition of a Si target. The influence of ρ, β, and the height of the Au seeds h on the morphology of the Si nanostructures for the case of the honeycomb pattern is discussed and compared with Monte Carlo simulations of glancing angle deposited sculptured thin films on templated substrates. It is found that in both experiment and simulation, depending on ρ either periodically arranged spiral-like or vertical column-like structures are grown, whereas changing β from 0° to a glancing 85° shifts the film morphology from dense with honeycomb-like arranged caps over partially grown together nanocolumns with hexagonally arranged pores in-between to separated nanostructures that replicate the templates honeycomb arrangement. Additionally, it was found both experimentally and in simulations that glancing angle sputter deposition on rapidly rotating substrates causes nanocolumns with triangular cross section on honeycomb templates and with circular cross sections on hexagonally close packed templates, showing that not only the inter-seed-distances, but also the symmetry of the template pattern influences the form of the growing nanostructures.