Paper EW-TuL2
Manipulation and Characterization of Nanoobjects in SEM

Tuesday, October 21, 2008, 12:40 pm, Room Exhibit Hall

Ultra-high precision spatial positioning of objects is of prime importance in the emerging field of nanotechnology. attocube systems, a German company located in Munich, manufactures and provides ultra-high precision spatial positioning systems and complete probing tools which are particularly suitable for extreme environmental conditions such as cryogenic temperatures (10 mK – 300 K), high magnetic fields (+31 T) and ultra high vacuum environments (5 x 10-11 mbar). attocube systems’ ultra-compact positioning devices enable linear, angular and rotational movement of samples or probes. They are offered in different sizes, as well as materials, and feature an unprecedented variety of applications particularly suitable for extreme environmental conditions. This represents a revolutionary advancement in the field of nano-positioning, leading to new research possibilities in many areas. Applications for these outstanding nanopositioning devices, well-known in many labs around the world, include, amongst other methods, SPM techniques such as confocal microscopy, scanning force microscopy, scanning tunneling microscopy, near-field optical microscopy, and scanning electron microscopy. Due to the unique working principle attocube’s nanopositioners are dedicated for usage in challenging application areas where the combination of high accuracy on one hand and large positioning range on the other one is required. Their excellent performance makes them consequently highly suitable for Scanning Electron Microscope (SEM) applications. The necessity of specific SEM tools and equipment for new fields for research and application becomes more important, particularly as the progress on nanofabrication moves the critical dimensions below the optical resolution limit. There is already a wide range of applications available using attocube’s SEM tools. One highly sophisticated system is an SEM probe station allowing the manipulation of nanoobjects on sub-nm level as well as the characterization of electrical properties under SEM conditions, simultaneously. The highest level of usability and flexibility offers attocube’s new Atomic Force Microscope (AFM) fully integrated into SEM. By combining major advances of these complementary systems, it is possible to run all AFM applications having full visible access to the tip position with respect to sample. For further technical information concerning attocube systems’ products, please visit the website www.attocube.com.