Paper EW-TuL1
Combining AFM and Instrumented Nanoindentation for Mechanical Characterization of Materials at the Nanoscale

Tuesday, October 21, 2008, 12:20 pm, Room Exhibit Hall

Nanoindentation applications have been a popular technique for characterizing a wide range of materials at the nanoscale. This workshop will discuss the Asylum Research NanoIndenter for true quantitative measurements. Unlike other commercially-available cantilever-based (AFM), the NanoIndenter drives the indenting tip perpendicular to the sample. The force is computed as the product of the spring constant and the measured indenter flexure displacement. This measurement is done by converting the vertical flexure displacement into an optical signal measured at the standard MFP-3D photodetector. Because the two quantities of indentation, depth and force, are computed based on displacements measured with AFM sensors, the indenter has unprecedented resolution. The NanoIndenter is also the first commercially-available instrumented nanoindenter that allows high voltage piezoresponse force microscopy (PFM) measurements. The NanoIndenter can operate, as well, when the sample is heated up to 300° C and under fluid. The technology and operation will be discussed along with current application examples including PFM.