| AVS 55th International Symposium & Exhibition | |
| Electronic Materials and Processing | Thursday Sessions |
| Session EM-ThP |
| Session: | Electronic Materials and Processing Poster Session |
| Presenter: | P.-J. Ko, Chosun University, Korea |
| Authors: | P.-J. Ko, Chosun University, Korea J.-S. Park, Chosun University, Korea H.-Y. Na, Chosun University, Korea N.-H. Kim, Chonnam National University, Korea W.-S. Lee, Chosun University, Korea |
| Correspondent: | Click to Email |
Cerium oxide (CeO2) is one of the most widely used materials for the oxygen gas sensors. Sensing properties of CeO2 is required to be improved by the fabrication to nanometer-scaled structure. The well-arrayed nanopillars of CeO2 in a large area were fabricated by nanosphere lithography and oxygen plasma etching process. The spin coated CeO2 thin films on silicon substrates by Sol-Gel method were prepared. Polystyrene beads of 100 nm were arrayed orderly on CeO2 thin films and they were ashed by oxygen plasma for decreasing the size of well-arrayed polystyrene beads. Plasma etching of CeO2 thin films was performed by inductively coupled plasmas (ICP) with the ashed polystyrene beads as a mask. The high-density nanometer-scaled pillars of CeO2 were successfully fabricated with a diameter of 50 nm and the distance of 50 nm between the neighboring beads. The effects of the fabrication of CeO2 nanopillar on the sensing properties were also investigated. The improved sensing properties of CeO2 for oxygen sensors were obtained after fabrication of nanopillar of CeO2 by the nanosphere lithography of polystyrene beads. Acknowledgement: This work was supported by Korea Research Foundation Grant (KRF-2007-412-J02003).