| AVS 55th International Symposium & Exhibition | |
| Applied Surface Science | Tuesday Sessions |
| Session AS-TuP |
| Session: | Aspects of Surface Analysis Poster Session |
| Presenter: | C.J. Blomfield, Kratos Analytical Ltd, UK |
| Authors: | C.J. Blomfield, Kratos Analytical Ltd, UK S.J. Hutton, Kratos Analytical Ltd, UK S.C. Page, Kratos Analytical Ltd, UK S.J. Coultas, Kratos Analytical Ltd, UK |
| Correspondent: | Click to Email |
Currently, the accepted method of analysis area determination for small area XPS is to scan either the selected area spot or area illuminated by the X-ray beam over a well defined edge. The maximum signal is assumed to be 100% and the minimum signal 0%, the value used to determine the analysis area is then defined as the distance for the signal to change from 80% to 20% (or 84% to 16%) of these values.1 This method has previously2 been shown to produce total analysis areas approximately three times the diameter of that given by this “edge” measurement. An alternative approach of comparing the signal measured when an analysis is taken in the centre of an aperture of predetermined size has recently been shown to be another valid method for analysis area determination.3 We have compared both of these methods for Kratos Axis Nova and Axis Ultra instruments which use a virtual probe approach, with the analysis area limited by both an area defining aperture and an angle defining iris to produce a Gaussian analysis area profile. The suitability of these methods and the implications to the true analysis area for the analyst will be discussed.
1ISO/TR 19319 Surface Chemical Analysis – Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy- Determination of lateral resolution, Analysis Area and Sample Area Viewed by the Analyser 2003
2Baer DR, Engelhard MH, Surf. Interface Anal 2000; 29 766
3 Scheithauer U, Surf. Interface Anal 2008.