| AVS 54th International Symposium | |
| MEMS and NEMS | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | MN-MoA1 Invited Paper Electromechanical Resonators from Graphene Sheets P.L. McEuen, Cornell University |
| 2:40pm | MN-MoA3 Determination of the Density, Viscosity and Activation Energy of Small Liquid Volumes using Microcantilevers G. Hähner, N. McLoughlin, S.L. Lee, University of St Andrews, Scotland, UK |
| 3:00pm | MN-MoA4 A Micromachined Ultrasound Transducer for Noncontact Nondestructive Evaluation X. Wang, Y. Fan, W.-C. Tian, H. Kwon, S. Kennerly, G. Claydon, A. May, General Electric Co. |
| 3:40pm | MN-MoA6 Design, Synthesis, and Fabrication of a Biomolecular Nanovalve H. Li, L.E. Ocola, O. Auciello, M.A. Firestone, Argonne National Laboratory |
| 4:00pm | MN-MoA7 XeF2 Etching of Si and SiO2 for MEMS Manufacturing J.-F. Veyan, Y.J. Chabal, Rutgers, The State University of New Jersey, M.Y. Yan, E. Gusev, A.L. Londergan, Qualcomm |
| 4:20pm | MN-MoA8 Invited Paper Advances in Magnetometry through Miniaturization A.S. Edelstein, J. Burnette, G.A. Fischer, U.S. Army Research Laboratory, S.F. Cheng, U.S. Naval Research Laboratory, E.R. Nowak, University of Delaware |
| 5:00pm | MN-MoA10 Fabrication of Stationary Micro-Optical Shutter Based on Semiconductor-To-Metallic Phase Transition of W-doped VO2 Active Layer Driven by an External Voltage M. Soltani, M. Chaker, INRS-Energie, Matériaux et Télécommunications, Canada, E. Haddad, R. Kruzelecky, MPB Communications Inc., J. Margot, Université de Montréal, Canada, P. Laou, S. Paradis, Defence R and D Canada-Valcartier |