| AVS 54th International Symposium | |
| MEMS and NEMS | Monday Sessions |
| Session MN-MoA |
| Session: | Materials Processing, Characterization and Fab Aspects |
| Presenter: | H. Li, Argonne National Laboratory |
| Authors: | H. Li, Argonne National Laboratory L.E. Ocola, Argonne National Laboratory O. Auciello, Argonne National Laboratory M.A. Firestone, Argonne National Laboratory |
| Correspondent: | Click to Email |
A device containing microfluidic and nanofluidic channels was designed and fabricated to study on the performance of a bio-nanovalve controlled by polarization of ferroelectric substrate. The microfluid channel consisting of 200 (W) x 200 (H) µm and 35 (W) x 200 (H) µm straight channels, micro-nozzles, and micro-diffusers, was designed to provide high driving pressure and low mass flow rate for fluid flow in the nanochannel. A recently developed lead-zirconium-titanate (PZT) substrate integrated with nano-electrodes was coated on the bottom of nanochannels to control the nanovalve made of biological molecules. By observing the fluid mixing behavior variation in nanofluid channels of 200 (W) x 200 (H) nm before and after the polarization of PZT substrate, the function of the bio-nanovalve would be demonstrated. The biovalve will prove useful for many applicatons including lab-on-a-chip and release-on-demand drug delivery systems. This device can also be used to study the basic science of fluid flow and heat transfer at the nanoscale with the purpose of improvement of flow and heat transfer efficiency in nanoscale devices.