AVS 54th International Symposium
    Vacuum Technology Thursday Sessions
       Session VT-ThP

Paper VT-ThP6
Viscosity and Diffusion Coefficient for a Gas Mixture Flow in a Tube, Valid Over the Whole Range of Knudsen Numbers

Thursday, October 18, 2007, 5:30 pm, Room 4C

Session: Vacuum Technology Poster Session (including Student Poster Competition with Cash Award)
Presenter: M. Vukovic, Tokyo Electron U.S. Holdings Inc.
Correspondent: Click to Email

The viscosity and diffusion coefficients for a two-gas mixture, valid over the whole range of Knudsen numbers (Kn), are obtained by applying the generalization procedure of Beskok and Karniadakis (Microscale Thermophysical Engineering 3, 43, 1999) to the Boltzmann equation solutions of a gas mixture flow in a pipe by Sharipov and Kalempa (J. Vac. Sci. Technol. A 20(3), 814.,2002). The transport coefficients are expressed in terms their continuum limit value, multiplied by a correction factor that depends on Kn and the species masses and relative concentration. These coefficients are applied to the problem of gas counterflow in the Kn=1 range.