AVS 54th International Symposium
    Vacuum Technology Thursday Sessions
       Session VT-ThP

Paper VT-ThP2
Experimental Measurements of Thermal Accommodation Coefficients for Microscale Gas-Phase Heat Transfer

Thursday, October 18, 2007, 5:30 pm, Room 4C

Session: Vacuum Technology Poster Session (including Student Poster Competition with Cash Award)
Presenter: L.A. Gochberg, Novellus Systems, Inc.
Authors: W.M. Trott, Sandia National Laboratories
D.J. Rader, Sandia National Laboratories
J.N. Castañeda, Sandia National Laboratories
J.R. Torczynski, Sandia National Laboratories
M.A. Gallis, Sandia National Laboratories
L.A. Gochberg, Novellus Systems, Inc.
Correspondent: Click to Email

An experimental apparatus is described that measures gas-surface thermal accommodation coefficients from the pressure dependence of the conductive heat flux between parallel plates separated by a gas-filled gap. Heat flux between the plates is inferred from measurements of temperature drop between the plate surface and an adjacent temperature-controlled water bath. Thermal accommodation coefficients are determined from the pressure dependence of the heat flux at a fixed plate separation. The apparatus is designed to conduct tests with a variety of gases in contact with interchangeable, well-characterized surfaces of various materials (e.g., metals, ceramics, semiconductors) with various surface finishes (e.g., smooth, rough). Experiments are reported for three gases (argon, nitrogen, and helium) in contact with pairs of 304 stainless steel plates prepared with one of two finishes: lathe-machined or mirror-polished. For argon and nitrogen, the measured accommodation coefficients for machined and polished plates are near unity and independent of finish to within experimental uncertainty. For helium, the accommodation coefficients are much lower and show a slight variation with surface roughness. Two different methods are used to determine the accommodation coefficient from experimental data: the Sherman-Lees formula and the GTR formula. These approaches yield values of 0.87 and 0.94 for argon, 0.80 and 0.86 for nitrogen, 0.36 and 0.38 for helium with the machined finish, and 0.40 and 0.42 for helium with the polished finish, respectively, with an uncertainty of ±0.02. The GTR values for argon and nitrogen are generally in better agreement with the results of other investigators than the Sherman-Lees values are, and both helium results are in reasonable agreement with values in the literature.