| AVS 54th International Symposium | |
| Vacuum Technology | Thursday Sessions |
| Session VT-ThP |
| Session: | Vacuum Technology Poster Session (including Student Poster Competition with Cash Award) |
| Presenter: | J.Y. Lim, Korea Research Institute of Standards and Science |
| Authors: | J.Y. Lim, Korea Research Institute of Standards and Science W.S. Cheung, Korea Research Institute of Standards and Science B.H. Moon, Samsung Electronics Company, Korea Y.H. Shin, Korea Research Institute of Standards and Science |
| Correspondent: | Click to Email |
Dry Vacuum Pumps are encountering rapid expansion of harsh and high throughput applications to semi-conductor/display industry. Besides their ability of making superior clean environment, they are normally exposed to clean to very harsh gas applications, thus often very easily contaminated with process byproducts in the forms of hard particles or coatings on the overall interior of the pumps. For this reason, even before installation in the process lines, detection of latent endurance for the pumps is a very important factor to diagnose primary mechanical, functional ability and internal controllable parameter settings during actual processes. With 40 to 300 slm of continuous dry air flow for one to three hours dependent on the pumping speeds, ten dry vacuum pumps carefully selected from six worldwide manufacturers were differently responded due to their internal structures, cooling systems, and breaker settings for body protection due to high temperature. Parameters such as inlet pressure, power consumption, and sound/vibration as well as parameters from SPM (single pump monitoring system) were carefully analyzed to diagnose the latent endurance of each pump. Characteristics mappings for all parameters were established for 1200 and 1800 m3/h dry vacuum pumps. In the case of total power consumption, 4 to 8 kW are manifested in range of atm. to 10-3 mbar. Dry pump body temperatures were very fluctuant in several pumps, thus minor or major modifications for their cooling systems may be necessary for those pumps. At the end of each test sequence, sudden vent test was performed to verify the pumping down characteristics as well as power consumption. Exposed to sudden avalanching mass flow, several pumps are diagnosed as relatively abnormal compared to their initial pumping down characteristics. Based on experimental results with integrated laboratory experimental system, we propose recommended characteristics design guidelines for dry vacuum pumps in the semi-conductor and display industry in the course of serial evaluation periods.