| AVS 54th International Symposium | |
| Vacuum Technology | Thursday Sessions |
| Session VT-ThP |
| Session: | Vacuum Technology Poster Session (including Student Poster Competition with Cash Award) |
| Presenter: | C.A. Adams, University of South Florida |
| Authors: | C.A. Adams, University of South Florida J.J. Register, University of South Florida |
| Correspondent: | Click to Email |
Construction of a Vacuum Tube Furnace with High Voltage Field for the Growth of Silicon Nanowires. The goal of this project is to build a vacuum tube furnace providing up to 1150 degrees Celsius in a vacuum of approximately 30 mTorr and an electric field of 5V/µm in density to the sample. Feed and purge gasses will need to be fed through into the chamber. The tube furnace will be constructed of a ceramic cylindrical heater element mounted in a stainless steal housing with carbon board insulation surrounded. The tube will be Quartz approximately 12.5 cm diameter and 122 cm long and 2.4 cm thick with an open end and the other end reducing to a 3/8 inch tube. A stainless steal termination will be designed and built to provide a vacuum seal to the open end of the tube. This termination will use viton gasket compression seal and end in a vacuum door. All feedthroughs will take place through the side walls of the termination collar. The vacuum system will consist of a two stage mechanical pump with a foreline trap and a thermocouple vacuum gage. MKS vacuum gage and mass-flow controllers will be integrated with Labview for operational programming and data recording. Labview will also be used to record the high voltage run time and values, control and record the temperature. The furnace heater element will be powered by an Omega PID controller coupled with a SSR.