Paper EW-TuA6
High Speed, High Resolution XPS Imaging

Tuesday, October 16, 2007, 3:20 pm, Room Exhibit Hall

XPS imaging is an established method for determining the qualitative lateral distribution of chemical species across a sample surface. Early methodologies for this technique involved XPS maps where a virtual or X-ray probe was scanned a cross a sample surface and an image built up pixel by pixel as the analysis point was moved across the sample. Other methods involved the parallel detection of a predefined field of view over one specific binding energy range. Improvements in detector technology and instrument design have lead to the development of truly quantitative pulse counting methods which give high lateral resolution XPS images with quantitative intensities over short time intervals. This presentation describes the technology required to achieve this level of performance and illustrates some applications which benefit from a quantitative chemical state imaging technique.