| AVS 54th International Symposium | |
| Electronic Materials and Processing | Thursday Sessions |
| Session EM-ThP |
| Session: | Electronic Materials and Processing Poster Session |
| Presenter: | D.-R. Liu, National Applied Research Laboratories, Taiwan |
| Authors: | D.-R. Liu, National Applied Research Laboratories, Taiwan C.-Y. Su, National Applied Research Laboratories, Taiwan |
| Correspondent: | Click to Email |
Diluted magnetic semiconductors (DMS) have recently attracted considerable attention due to their potential applications for spintronic devices, such as spin-valve transistors, nonvolatile memory, and magneto-optical switches. ZnMnO is one of the most promising DMS materials due to its predicted above room temperature ferromagnetism. In this study, the Zn(1-x)Mn(x)O (0.04 < x < 0.30) thin films were grown on sapphire(0001) substrates by Nd:YAG pulsed laser deposition(PLD). The thickness and roughness of the films were characterized by grazing-incidence x-ray reflectivity (GIXR). Atomic force microscopy (AFM) and magnetic force microscopy (MFM) were employed to characterize the surface properties of these films. The high-resolution x-ray diffraction was used to evaluate the crystal quality of the films. The magnetic properties of the ZnMnO thin films were measured by a superconducting quantum interference device (SQUID) magnetometer. Photoluminescence (PL) spectroscopy and ellipsometer were used to characterize the optical properties. The results show that oxygen is very important for the properties of ZnMnO thin films.