Paper AS-TuA3
C60 Molecular Depth Profiling: A Fundamental Study using a 3D Organic System

Tuesday, October 16, 2007, 2:20 pm, Room 610

C₆₀ sputtering of organic materials enables the possibility of producing 3 dimensional reconstructions of the distribution of organic compounds. We demonstrate that many organic materials have identical yield volumes (volume sputtered per incident ion) and that, in general, sputtering yield is a well behaved function of ion dose. Irganox layers were created by vacuum evaporation to create well-defined stacks of organic materials with controllable layer thicknesses. These layered materials were employed to determine the energy dependence of sputtering yield, depth resolution and damage accumulation during C₆₀ depth profiling. We show that sputtering yield increases with C₆₀ ion energy and that depth resolution concomitantly becomes poorer. The multilayers are also used to demonstrate how the depth resolution degrades with depth and a comparison with AFM data shows that the resolution is mainly limited by topography. Examples are also shown of the lateral and depth distribution of mixed organic systems.