AVS 54th International Symposium | |
Applied Surface Science | Tuesday Sessions |
Session AS-TuA |
Session: | 3-Dimensional Characterization |
Presenter: | A.G. Shard, National Physical Laboratory, UK |
Authors: | A.G. Shard, National Physical Laboratory, UK I.S. Gilmore, National Physical Laboratory, UK |
Correspondent: | Click to Email |
C60 sputtering of organic materials enables the possibility of producing 3 dimensional reconstructions of the distribution of organic compounds. We demonstrate that many organic materials have identical yield volumes (volume sputtered per incident ion) and that, in general, sputtering yield is a well behaved function of ion dose. Irganox layers were created by vacuum evaporation to create well-defined stacks of organic materials with controllable layer thicknesses. These layered materials were employed to determine the energy dependence of sputtering yield, depth resolution and damage accumulation during C60 depth profiling. We show that sputtering yield increases with C60 ion energy and that depth resolution concomitantly becomes poorer. The multilayers are also used to demonstrate how the depth resolution degrades with depth and a comparison with AFM data shows that the resolution is mainly limited by topography. Examples are also shown of the lateral and depth distribution of mixed organic systems.