| AVS 54th International Symposium | |
| Applied Surface Science | Monday Sessions |
| Session AS-MoM |
| Session: | Quantitative Surface Analysis I. Electron Spectroscopies: (Honoring the contributions of Martin Seah, NPL, and Cedric Powell, NIST) |
| Presenter: | M. Suzuki, ULVAC-PHI, Inc., Japan |
| Authors: | M. Suzuki, ULVAC-PHI, Inc., Japan K. Mamiya, ULVAC-PHI, Inc., Japan N. Urushihara, ULVAC-PHI, Inc., Japan N. Sanada, ULVAC-PHI, Inc., Japan D.F. Paul, Physical Electronics S. Bryan, Physical Electronics |
| Correspondent: | Click to Email |
Auger electron spectroscopy (AES) is widely used for surface elemental analysis of the outer several nm of a material surface. Quantification is performed by converting signal intensities to elemental concentrations with relative sensitivity factors (RSF's). In practice, elemental RSF (ERSF) or atomic RSF (ARSF) tables are utilized in AES quantification. However, ISO18118:20041 recommends adopting an average matrix RSF (AMRSF), which includes corrections of matrix effects that are affected by elastic scattering, backscattering, inelastic mean free paths and atomic densities. In this study we calculate AMRSF's for the primary electron accelerating voltages of 3 kV, 5 kV, and 10 kV according to ISO18118 from experimentally obtained ERSF's. Comparing AMRSF's and ERSF's, there are greater differences for main group elements than for transition elements. For main group elements, AMRSF values are smaller than ERSF's for second row elements, while they inversely correlate for fifth and sixth row elements. So far, ERSF's for AES quantification have been provided as a database for primary electron energies less than 10 kV. Higher voltages, such as 20 kV or 30 kV, are in common use today in field emission AES instruments in order to achieve high spatial resolution. Thus RSF's for primary voltages higher than 10 kV are strongly desired for quantification of small areas. Therefore, we have extended AMRSF's for higher than 10 kV using Ichimura-Shimizu's backscattering factors2 and Gryzinski's ionization cross-sections.3 The former ones are assumed to be extrapolatable for higher than 10 kV.4 In order to examine the validity of these calculations, experimentally obtained AMRSF's for 3 kV and 5 kV are compared with those calculated for 10 kV AMRSF's, showing good agreement. In the presentation, concentrations derived from AMRSF's will be compared with those from ERSF's for several kinds of compound materials.
1 ISO 18118:2004, Surface chemical analysis - AES and XPS- Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials.
2 S. Ichimura, R. Shimizu, and J. P. Langeron.
3 M. Gryzinski, Phys. Rev. A336, 138 (1965).
4 S. Tanuma, private communications. (to be submitted to J. Surf. Anal.).