AVS 66th International Symposium & Exhibition
    Vacuum Technology Division Tuesday Sessions
       Session VT-TuP

Paper VT-TuP4
Hellum Gas Transmission Rate of Elastomer Seal with a Back-up Ring Seal

Tuesday, October 22, 2019, 6:30 pm, Room Union Station B

Session: Vacuum Technology Poster Session
Presenter: Masaharu Miki, EM Technical Lab Inc., Japan
Authors: M. Miki, EM Technical Lab Inc., Japan
S. Nowatari, IIDA Co., Ltd, Japan
H. Hanada, IIDA Co., Ltd, Japan
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Hellum gas transmission rate of elastomer seal with a back-up ring seal was studied using the metal-sealed Hellum leak detector. Three kinds of samples were prepared. One is an elastomer seal (JIS B 2401 V40) without a back-up ring seal. Second is the same size elastomer seal with a back-up ring seal which adheres to the atmospheric-side surface of the elastomer seal and is made of some resin. The last is the same one with a back-up ring seal except the seal surface of the back-up ring seal is not flat but having some structure. Hellum gas transmission rate was measured and evaluated. It was found that the elastomer seal with the back-up ring seal has very low Hellum gas transmission rate, which is about less than 10% of the case without a back-up ring seal. It is like the case of a metal seal. On the other hand, the difference of the seal surface of the back-up ring seals was not found. Anyway, the elastomer seal with the back-up ring seal must be useful as seals to make vacuum chambers up-grade which structure cannot permit to use any metal seals. Pumping-down curves on total vacuum pressure and residual gas pressure ( O2, H2O , etc.) in a vacuum chamber using the elastomer seal with the back-up ring seal are under investigation.