| AVS 66th International Symposium & Exhibition | |
| Vacuum Technology Division | Monday Sessions |
| Session VT-MoM |
| Session: | Pumping, Outgassing, leaks, and Vacuum Pressure Measurement |
| Presenter: | Martin Wüest, INFICON Ltd., Liechtenstein |
| Authors: | M.P. Wüest, INFICON Ltd., Liechtenstein Y. Kuzminykh, INFICON Ltd., Liechtenstein G. Mata Osoro, INFICON Ltd., Liechtenstein W. Fuchs, INFICON Ltd., Liechtenstein J. Gabathuler, INFICON Ltd., Liechtenstein L. Ospelt, INFICON Ltd., Liechtenstein |
| Correspondent: | Click to Email |
We built a vacuum system for calibration of total pressure sensors in the conventional way. We made initial performance measurements such as pumpdown times and achieved base pressure. This system was then taken apart and the stainless steel parts (chamber and fittings) were then coated with an Al2O3 layer using an ALD process. To do this we cleaned the parts with ozone, heated them to 300 °C and then finally coated them with an Al2O3 ALD process. We rebuilt the vacuum system using those coated parts and performed the performance test again. The result is that we can achieve a lower base pressure in shorter time. The achieved base pressure is approximately a factor 3 lower in the coated version compared to the uncoated version.