| AVS 66th International Symposium & Exhibition | |
| Nanometer-scale Science and Technology Division | Thursday Sessions |
| Session NS+2D+QS-ThM |
| Session: | Direct Atomic Fabrication by Electron and Particle Beams & Flash Session |
| Presenter: | Alex Belianinov, Oak Ridge National Laboratory |
| Authors: | A. Belianinov, Oak Ridge National Laboratory S. Kim, Pusan National University, South Korea V. Iberi, Oak Ridge National Laboratory S. Jesse, Oak Ridge National Laboratory O.S. Ovchinnikova, Oak Ridge National Laboratory |
| Correspondent: | Click to Email |
Recent advances in CVD-growth consistently yield high quality 2D materials for large(er) scale fabrication. Monolayers of molybdenum and tungsten diselenide and suflide, graphene, and other exotic 2D materials are becoming routine in fabrication of functional electronic and optoelectronic devices. In order to attain novel functionalities, it is critical to tune and engineer defects in 2D materials directly with nanometer precision. Advances in ion beam-based imaging and nanofabrication techniques have offered a pathway to precisely manipulate 2D materials and offer a roadmap to create junctions, amorphized areas, and introduce dopants for new types of electronic devices. Here, we demonstrate the use of a focused helium and neon ion beams in a scanning helium ion microscope (HIM) in tailoring material functionality in MoSe2, WSe2, CuInP2S6 and graphene.
The helium ion microscope can “direct-write” capabilities, capable of both imaging and nanofabrication with Helium and Neon gases, thus making it an excellent candidate for processing a wide range of 2D, and conventional materials. We explore milling by the helium and neon ion beams of suspended and supported samples in order to control material’s electronic and mechanical properties. We validate the results with other chemical imaging techniques such as Scanning Transmission Electron Microscopy, correlated band excitation (BE) scanning probe microscopy, and photoluminescence (PL) spectroscopy.
Acknowledgement
This work was conducted at the Center for Nanophase Materials Sciences (CNMS), which is a U.S. Department of Energy (DOE) Office of Science User Facility.