AVS 66th International Symposium & Exhibition
    MEMS and NEMS Group Monday Sessions
       Session MN-MoM

Paper MN-MoM6
Impacts of Stress and Dissipation in van der Waals Interfaces on 2D Material Nanoelectromechanical Systems

Monday, October 21, 2019, 10:00 am, Room A210

Session: MEMS, BioMEMS, and MEMS for Energy: Processes, Materials, and Devices I
Presenter: SunPhil Kim, University of Illinois at Urbana-Champaign
Authors: S. Kim, University of Illinois at Urbana-Champaign
A.M. van der Zande, University of Illinois at Urbana-Champaign
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Two-dimensional materials such as graphene and MoS2represent the ultimate limit of both nanoelectronic and nanoelectromechanical systems due to their intrinsic molecular scale thickness. While 2D materials exhibit many useful properties, many of the most exciting phenomena and applications arise at the van der Waals interface. Electrically, the van der Waals interface enables the constructing of heterostructures and molecular scale electronics. Mechanically, the van der Waals interface displays superlubricity[1] or solitons[2] depending on whether the interface is aligned. A fascinating question is how the van der Waals interface affects the mechanical properties of 2D membranes. Answering this question is important to incorporating 2D heterostructure electronics into diverse applications such as highly tunable nanoelectromechanical systems from suspended 2D membranes, stretchable electronics from crumpled 2D materials, and origami/kirigami nano-machines.

In this study, we explore the impact of the van der Waals interface by comparing mechanical resonance of electrostatically contacted circular drumhead resonators made from atomic membranes of monolayer graphene to commensurate (Bernal stacked) bilayers, incommensurate (twisted) bilayer, and graphene-MoS2heterostructures (2D bimorph).

For Bernal stacked bilayer, we observe the creation and destruction of individual solitons manifesting as stochastic jumps in the mechanical resonance frequency tuning. We find individual dislocation creation and destruction of single solitons lead to shifts in membrane stress of < 7 mN/m or an in-plane interlayer slip distance of < 0.7 Å. We observe similar jumps in the few layer graphene and heterostructure, but not in the twisted bilayer.

For twisted bilayer, temperature and amplitude dependent studies reveal that the resonators show a factor of 3 higher dissipation rate, leading to different nonlinear behaviors compared to monolayer graphene and Bernal stacked bilayer resonators.

These results show that van der Waals interfaces strongly affect stress and dissipation of many multilayer 2D atomic membranes; an important consideration in engineering 2D nanomechanical devices.

[1]Dienwiebel, M.; Verhoeven, G. S.; Pradeep, N.; Frenken, J. W. M.; Heimberg, J. A.; Zandbergen, H. W., Superlubricity of graphite. Phys Rev Lett 2004,92(12).

[2]Alden, J. S.; Tsen, A. W.; Huang, P. Y.; Hovden, R.; Brown, L.; Park, J.; Muller, D. A.; McEuen, P. L., Strain solitons and topological defects in bilayer graphene. P Natl Acad Sci USA 2013,110(28), 11256-11260.