| AVS 66th International Symposium & Exhibition | |
| MEMS and NEMS Group | Monday Sessions |
| Session MN-MoM |
| Session: | MEMS, BioMEMS, and MEMS for Energy: Processes, Materials, and Devices I |
| Presenter: | Grace Pakeltis, University of Tennessee Knoxville |
| Authors: | G. Pakeltis, University of Tennessee Knoxville E. Mutunga, University of Tennessee Knoxville Z. Hu, University of Washington D. Masiello, University of Washington J.C. Idrobo, Oak Ridge National Laboratory H. Plank, Graz University of Technology, Austria J.D. Fowlkes, Oak Ridge National Laboratory P.D. Rack, University of Tennessee Knoxville |
| Correspondent: | Click to Email |
New breakthroughs and better understanding in the underlying theory of plasmonics has led to an increased demand for advanced design, synthesis and device integration strategies for plasmonic nanomaterials. Three-dimensional plasmonic nanostructures have the ability to advance applications such as ultra-fast communication, high density memories, and sensing while enabling further investigation into plasmonic physical phenomena. In this study, we illustrate a nanoscale synthesis process which utilizes a hybrid of direct-write 3D nanoprinting and thin film deposition to fabricate complex, free-standing plasmonic nanostructures for the investigation of 3D plasmonics. Focused electron beam induced deposition is used to deposit non-plasmonic 3D scaffolds, which are subsequently isolated with a conformal SiO2 layer and coated with a plasmonic materials, specifically Au, to create functional 3D plasmonic nanostructures. A variety of single and dimer structures were fabricated and low-loss electron energy loss spectroscopy was utilized to characterize their full plasmonic spectra with nanoscale resolution. Complementary electron discrete dipole approximation simulations were performed to elucidate the resultant consequent electric and magnetic field distributions. This work demonstrates the flexibility FEBID scaffolds offer for the advancement of new 3D devices for applications and fundamental studies of plasmonic nanomaterials.