AVS 66th International Symposium & Exhibition
    MEMS and NEMS Group Monday Sessions
       Session MN-MoA

Invited Paper MN-MoA9
Constructive Utilization of Nonlinear Dynamics in MEMS/NEMS

Monday, October 21, 2019, 4:20 pm, Room A210

Session: Microfabricated Systems for Gas Chromatography and Nanomechanical Mass Sensing
Presenter: Hanna Cho, The Ohio State University
Correspondent: Click to Email
During the last decades, we have witnessed that MEMS/NEMS revolutionized fundamental and applied science. However, due to small size and low damping, these devices often exhibit significant nonlinearity and thus the operational range of these impressive applications shrinks. Therefore, understanding the mechanisms leading to nonlinearity in such systems will eliminate obstacles to their further development and significantly enhance their performance. Motivated by the need to advance current capabilities of MEMS/NEMS, our research has been focused on the implementation of intentional intrinsic nonlinearity in the design of MEMS/NEMS resonators and proved that harnessing intentional strong nonlinearity enables exploiting various nonlinear phenomena, not attainable in linear settings, such as broadband resonances, dynamic instabilities, nonlinear hysteresis, and passive targeted energy transfers. We developed a comprehensive analytical, numerical, and experimental methodology to consider structural nonlinearity as a main design factor enabling to tailor mechanical resonances and achieve targeted performance. We investigated the mechanism of geometric nonlinearity in a non-prismatic microresonator and suggested strategies to tailor the various types of nonlinear resonance. Our recent works focus on exploiting nonlinearity and multimodality simultaneously by internally coupling two or more modes through the mechanism of internal resonance or combination resonance. This talk will introduce various types of nonlinearity realized in micro/nanomechanical systems and discuss their unique behavioral features that can be exploited in the field of MEMS/NEMS.