| AVS 66th International Symposium & Exhibition | |
| MEMS and NEMS Group | Monday Sessions |
| Session MN-MoA |
| Session: | Microfabricated Systems for Gas Chromatography and Nanomechanical Mass Sensing |
| Presenter: | Henry Davis, Brigham Young University |
| Authors: | H. Davis, Brigham Young University D. McKenna, Brigham Young University J. Harkness, Brigham Young University D. Kane, Brigham Young University R.R. Vanfleet, Brigham Young University R.C. Davis, Brigham Young University |
| Correspondent: | Click to Email |
There are a variety of microfabricated structures, materials and devices that could enable high performance microscale gas chromatography systems, such as micro pillar arrays and porous resonant mass detectors. However, integration of these structures into microscale gas chromatography systems will require a high degree of control over surface geometry and surface chemical functionalization. Here we will describe processes using liquid deposition of silsesquioxanes and oxide atomic later deposition for control of surface chemistry and geometry of micro and nanoscale structures.