| AVS 66th International Symposium & Exhibition | |
| MEMS and NEMS Group | Monday Sessions |
| Session MN-MoA |
| Session: | Microfabricated Systems for Gas Chromatography and Nanomechanical Mass Sensing |
| Presenter: | James Harkness, Brigham Young University |
| Authors: | J. Harkness, Brigham Young University H. Davis, Brigham Young University A.C. Davis, Brigham Young University R.C. Davis, Brigham Young University B.D. Jensen, Brigham Young University R.R. Vanfleet, Brigham Young University |
| Correspondent: | Click to Email |
Micro gas chromatography (GC) has suffered from poor separations due to short column length and stationary phase pooling, however introducing a thermal gradient along a GC micro-column has been shown to enhance separations. We will present a thermally isolated micro-column for thermal gradient GC, fabricated using a two-wafer deep silicon etch/bond/etch process. Desired thermal isolation was achieved by forming suspended micro-columns that enable low-power thermal control using passive and active elements.