AVS 66th International Symposium & Exhibition
    MEMS and NEMS Group Monday Sessions
       Session MN-MoA

Invited Paper MN-MoA3
An Integrated Passive µPreconcentrator with Progressively-Heated µInjector for µGC

Monday, October 21, 2019, 2:20 pm, Room A210

Session: Microfabricated Systems for Gas Chromatography and Nanomechanical Mass Sensing
Presenter: Edward Zellers, University of Michigan
Authors: R. Hower, University of Michigan
C. Zhan, University of Michigan
M. Akbar, University of Michigan
N. Nuñovero, University of Michigan
J. Wang, University of Michigan
J. Potkay, University of Michigan
E. Zellers, University of Michigan
Correspondent: Click to Email

We report on a new device designed to serve as a universal ‘front-end’ for gas chromatographic microsystems (µGC) for remote, long-term monitoring of vapor-phase chemical threats or environmental pollution. This small, low-power, Si/glass-micromachined device, dubbed a micro-collector/injector (µCOIN), combines a passive micro-preconcentrator (µPP) with a progressively heated micro-injector (µPHI). The µPP samples vapors at known rates by molecular diffusion and transfers them under active flow via thermal desorption to the µPHI, which, in turn, injects them to a downstream (µGC) separation column via progressive (sequential) heating. Most testing to date was performed with discrete devices, both of which contain tandem cavities packed with granular carbon-based adsorbents of different specific surface areas. Carbopack B (CB, 100 m2/g) and Carbopack X (CX, 240 m2/g) were used for most compounds. But CX was used with Carboxen 1003 (C3, 1000 m2/g) for more volatile compounds. Using a conventional GC for downstream analyses, we have found that the µPP (CX/CB) can collect vapors of widely different volatility at a nearly constant effective sampling rate for up to 24 hrs (low concentrations) and over a 2,500-fold concentration range (0.25-hr samples). Effective (compound-specific) sampling rates ranged from ~0.25 to 0.69 mL/min, most of which agreed with theoretical predictions. Desorption/transfer efficiencies from the µPP were > 87% (most > 94%) at 5 mL/min and 250 °C for 60 sec. For the µPHI (CX/CB) bolus challenges of compounds at 5mL/min, mimicking transfer from the µPP, resulted in > 90% capture efficiency for up to 3.6 µg of lower volatility compounds. More volatile or highly polar compounds required the CX/C3-loaded device. Back-flushed progressive heating of the µPHI produced injection bands < 250 ms wide at flow rates < 0.5 mL/min. In separate tests, remarkable selectivity for polar compounds was achieved by applying an ionic-liquid surface modifier to the carbon adsorbents (tests in the µPP and µPHI are pending). The monolithically integrated µCOIN (0.23 cm3) has not yet been tested. But, a hybrid-integrated µCOIN (capillary connections) provided good preliminary performance, including efficient sampling, transfer, and injection of multi-component mixtures. Valveless flow modulation was implemented to avoid backflow to the µPP. Using typical power levels for each device, two valves, a pump, an interconnect heater, and supporting electronics, the energy consumption was only 320 J per cycle for the hybrid µCOIN. Thus, the µCOIN shows promise as a component in future ultra-low-power µGC systems for analyzing complex vapor mixtures.