| AVS 66th International Symposium & Exhibition | |
| Applied Surface Science Division | Thursday Sessions |
| Session AS-ThP |
| Session: | Applied Surface Science Poster Session |
| Presenter: | Vincent Smentkowski, GE-Research |
| Authors: | V. Smentkowski, GE-Research R. Hart, GE-Research H. Cao, GE-Research F. Kollmer, IONTOF GmbH, Germany J. Zakel, IONTOF GmbH, Germany H. Arlinghaus, IONTOF GmbH, Germany |
| Correspondent: | Click to Email |
Depth profiling (1D or 3D) is often used to determine the depth distribution of species in a material. Depth profiling works well when the surface of a sample is smooth and when the depth(s) are in the nm to micron thickness range. For thicker layers, one can mount the material in epoxy and generate a cross section which can be imaged. Unfortunately, cutting and polishing often damages (or at least smears) fragile materials such Li ion batteries. Over the two past decades, Focused Ion Beam (FIB) has proven to be a viable approach to expose sub surface layers 10s of microns thick which is often analyzed by SEM or TEM in conjunction with EDS [1]. Unfortunately, most EDS detectors are not able to detect light species such as Li and C (especially at the degraded vacuum which most SEM’s operate under), and definitely can not detect H. ToF-SIMS not only detects all elements (and their isotopes), it also allows for the analysis of molecular fragments which is often critical for understanding the material. FIB/ToF-SIMS has been used to analyze other material systems [2, 3].
In this late breaking poster, we will provide preliminary in-situ FIB/ToF-SIMS results which were generated on an anode taken from a Li ion battery. In order to simultaneously obtain high lateral resolution images at high mass resolution, the delayed extraction data collection mode was utilized [4]. The advantages of multivariate statistical analysis (MVSA) for these complex data sets will be demonstrated.
[1] Lucille A. Giannuzzi, and Fred A. Stevie, Eds., “Introduction to Focused Ion Beams”, Springer-Verlag US (2005) DOI: https://doi.org/10.1007/b101190.
[2] Felix Kollmer, D. Rading, R. Moellers, H.-G. Cramer, Wolfgang Paul, Ewald Niehuis, “Novel Cluster Ion Beams For Secondary Ion Generation, Sputtering And FIB/SIMS Application”, Microscopy and Microanalysis 18(S2) (2012) 904-905; DOI: 10.1017/S143192761200637X.
[3] John S. Hammond, Gregory L. Fisher, Scott R. Bryan, Rait Kanarbik and Pritt Möller “FIB-TOF Tomography of Solid Oxide Fuel Cells”, Microscopy and Microanalysis 19 (suppl 2) (2013) 672-673, DOI:10.1017/S1431927613005357.
[4] Quentin P. Vanbellingen, Nicolas Elie, Michael J. Eller, Serge Della-Negra, David Touboul, Alain Brunelle, “Time‐of‐flight secondary ion mass spectrometry imaging of biological samples with delayed extraction for high mass and high spatial resolutions” Rapid Commun. Mass Spectrom. 29 (2015) 1187–1195, DOI: 10.1002/rcm.7210