AVS 65th International Symposium & Exhibition
    Vacuum Technology Division Tuesday Sessions

Session VT-TuA
IoT Session: Vacuum System Design and Automation & Flash Networking Session

Tuesday, October 23, 2018, 2:20 pm, Room 203B
Moderators: Julia Scherschligt, National Institute of Standards and Technology, Martin Wuest, INFICON

  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:20pm VT-TuA1 Invited Paper
Vacuum Chamber Design and Fabrication.
Steve Greuel, Nor-Cal Products
3:00pm VT-TuA3 Invited Paper
The Importance of Vacuum Cleanliness in Semiconductor Process Control SEM Tools
Irit Ruach Nir, Applied Materials, Israel, M. Eilon, K. Luria, G. Eytan, Applied Materials
4:20pm VT-TuA7 Invited Paper
Compact Ultra High Vacuum Systems for Applications of Cold Matter
Evan Salim, S. Hughes, M.A. Perez, D.Z. Anderson, ColdQuanta Inc.
5:00pm VT-TuA9 Invited Paper
Plasma Window as Vacuum Atmosphere Interface for Various Applications
Ady Hershcovitch, Brookhaven National Laboratory
5:40pm VT-TuA11
Applications of IoT in Vacuum Technology
Jacob Ricker, J. Hendricks, NIST