AVS 65th International Symposium & Exhibition | |
Thin Films Division | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
8:00am | TF-TuM1 Atomic Layer Deposition of the Metal Pyrites FeS2, CoS2, and NiS2 Xinwei Wang, Shenzhen Graduate School, Peking University, China |
8:20am | TF-TuM2 Atomic Layer Deposition of Yttrium Fluoride and Yttrium Oxyfluoride Films with Tunable Stoichiometry Jasmine Wallas, J.A. Murdzek, D.K. Lancaster, A.S. Cavanagh, S.M. George, University of Colorado at Boulder |
8:40am | TF-TuM3 Synthesis of Single Phase Two-dimensional SnS2 by Plasma-enhanced Atomic Layer Deposition J.J. Pyeon, I.-H. Baek, Korea Institute of Science and Technology, T.-M. Chung, Korea Research Institute of Chemical Technology, J.H. Han, Seoul National University of Science and Technology, C.-Y. Kang, SeongKeun Kim, Korea Institute of Science and Technology, Republic of Korea |
9:00am | TF-TuM4 Phase Selective, Low Temperature Growth of TiO2 by Atomic Layer Epitaxy Jason Avila, D.R. Boris, S.B. Qadri, J.A. Freitas, S.G. Walton, U.S. Naval Research Laboratory, C.R. Eddy, Jr., U. S. Naval Research Laboratory, V.D. Wheeler, U.S. Naval Research Laboratory |
9:20am | TF-TuM5 Substrate Biasing During Plasma Atomic Layer Deposition: From Stress-controlled Oxides to Low-resistivity Nitrides Harm Knoops, Oxford Instruments, The Netherlands, T.F. Faraz, K. Arts, S. Karwal, M.C. Creatore, W.M.M. Kessels, Eindhoven University of Technology, The Netherlands |
9:40am | TF-TuM6 Development of Novel Superconducting ALD Films for Astronomy Applications Frank Greer, P. Day, B. Eom, H. Leduc, Jet Propulsion Laboratory, California Institute of Technology |
11:00am | TF-TuM10 Atomic Layer Deposition of Cobalt Nanoparticles Gerben van Straaten, W.M.M. Kessels, M.C. Creatore, Eindhoven University of Technology, The Netherlands |
11:20am | TF-TuM11 Atomic Layer Deposition of Ni-Al-O Catalysts for Water Oxidation Jon Baker, J.R. Schneider, J.A. Singh, A.J. Mackus, S.F. Bent, Stanford University |
11:40am | TF-TuM12 Atomic Layer Deposition of Bismuth Vanadate Photoanodes Sudarat Lee, A.R. Bielinski, S.L. Esarey, J.J. Brancho, University of Michigan, Ann Arbor, B.M. Bartlett, University of Michigan, Ann Arbor, N.P. Dasgupta, University of Michigan, Ann Arbor |
12:00pm | TF-TuM13 ALD of Cobalt Phosphate Electro-catalyst for Oxygen Evolution Reaction Valerio Di Palma, Eindhoven University of Technology, The Netherlands, G. Zafeiropoulos, M.N. Tsampas, DIFFER, W.M.M. Kessels, M.C. Creatore, Eindhoven University of Technology, The Netherlands |