| AVS 65th International Symposium & Exhibition | |
| Advanced Surface Engineering Division | Monday Sessions |
| Session SE-MoA |
| Session: | New Challenges and Opportunities in Surface Engineering |
| Presenter: | Joe. H. Hsieh, Ming Chi University of Technology, Taiwan, Republic of China |
| Authors: | J.H. Hsieh, Ming Chi University of Technology, Taiwan, Republic of China C. Li, National Yang Ming University, Taiwan, Republic of China C.C. Hsu, Ming Chi University of Technology, Taiwan, Republic of China |
| Correspondent: | Click to Email |
In this study, a triple-layered thin film structure was designed and fabricated in order to realize porous and tunable TaOxNy thin films with enhanced biocompatibility and antibacterial behavior. In the design of film structure, the top layer was made of porous and tunable TaOxNy. The porous structure was obtained from TaOxNy-Cu (>50 at.%) thin films deposited by reactive sputtering. After the film was annealed by using RTA (1st annealing), the Cu phase was etched away to form TaOxNy network structure. The bottom layer was TaN-Ag (11 at.%) which is used as a Ag source layer. It also provided toughness and hardness. A thin TaN film was inserted between porous TaOxNy layer and solid TaN-Ag layer, and used as Ag diffusion control layer. The function of this layer was to withstand the 1st annealing, then, during the 2nd annealing, to let certain amount of Ag diffusive to the porous TaOxNy layer, and formed Ag nanoparticles. The films fabricated based on this design were studied systematically on their mechanical properties, Ag particle formation, as well as pore size and morphology. Finally, antibacterial property and biocompatibility of these films were studied in terms of O/N ratio, dealloying process, and Ag diffusion control. The relationships among O/N ratio, Ag nanoparticle formation, porosity, and bio-reactions will be discussed and reported systematically.