| AVS 65th International Symposium & Exhibition | |
| Manufacturing Science and Technology Group | Tuesday Sessions |
| Session MS-TuP |
| Session: | Topics in Manufacturing Science and Technology Poster Session |
| Presenter: | Richard Elzer, Entegris |
| Authors: | R.D. Elzer, Entegris K.W. Olander, Retired co-founder of ATMI Corp |
| Correspondent: | Click to Email |
The history of high pressure toxic gases is riddled with safety events, actual injuries and deaths as well as near misses, some reported and many not report. In some cases, the risk profile of these gases has driven organizations to adopt low % gas mixtures that may impact process results.
Technology has been developed to store and deliver pure undiluted (neat) gases in a manner that drastically reduces the risk, with multiple technologies implemented. In one implementation, gas is stored in a gas cylinder and delivered subatmospherically.
In another implementation, gases are stored at high pressure but delivered from the gas cylinder subatmopherically. Both neat gases as well as specialty gas mixtures may be delivered from this gas package.
In a third implementation for processes requiring delivery pressures above atmospheric pressure, gases are stored at high pressure but delivered from the gas cylinder at 100psi. Again, both neat gases as well as specialty gas mixtures may be delivered from this gas package.
We will present the technologies and provide insights
improved process results
Removal of excess impurities
More deliver grams of target gas per cylinder
Insurers and Regulatory Bodies’ view and preference for the safe package
Unique classifications by the US DOT
Cylinder sizes and configurations available for various applications