AVS 65th International Symposium & Exhibition
    Manufacturing Science and Technology Group Tuesday Sessions
       Session MS-TuP

Paper MS-TuP3
Trace Level Detection of Gas Impurities Using Atmospheric Pressure Ionization Mass Spectrometry

Tuesday, October 23, 2018, 6:30 pm, Room Hall B

Session: Topics in Manufacturing Science and Technology Poster Session
Presenter: Gregory Thier, Extrel CMS
Correspondent: Click to Email

Analysis of trace amounts of impurities in gases is crucial for applications such as Environmental Monitoring, Catalysis, Semiconductor Production, and others. Atmospheric Pressure Ionization Mass Spectrometry (APIMS) provides a technique for detecting and monitoring very low level impurities in these gases. Atmospheric pressure ionization is a chemical ionization method used in a variety of spectrometry and chromatography analyses. APIMS uses gas-phase ion-molecule collisions at atmospheric pressure for ionization and detection of trace components and impurities. Using an Extrel® VeraSpecTM Trace API Mass Spec, detection limits of less than 5 parts per trillion (ppt) have been observed. By optimizing energy of ion-molecule collisions, these low detection limits have been observed in samples with complex mixtures. This method is used for research applications of gas characterization, but has also been applied to real-time monitoring of gases.