| AVS 65th International Symposium & Exhibition | |
| MEMS and NEMS Group | Wednesday Sessions |
| Session MN+2D+AN+NS-WeA |
| Session: | IoT Session: MEMS for IoT: Chemical and Biological Sensing |
| Presenter: | Rob Candler, University of California at Los Angeles |
| Correspondent: | Click to Email |
We are witnessing a rapid expansion of embedded devices (IoT) that have a variety of functions but a common requirement, to communicate with one another. These devices will be connected on a scale previously unseen, and they will therefore require an approach to efficiently generate and receive electromagnetic waves in a small form factor. One such approach is to rethink the way electrically small antennas operate, shifting from a current-based antenna to a voltage-controlled multiferroic antenna. Multiferroics are material systems with coupled magnetic and electrical properties, and they offer a new route for the miniaturization of magnetic field-coupled devices. Multiferroic systems allow for the conversion of magnetic flux to a voltage (and vice versa) without the need of a wire loop, avoiding inefficiencies due to Ohmic loss. In particular, strain-coupled heterostructures of magnetostrictive and piezoelectric materials have received much attention, as they can offer magneto-electric coupling many order of magnitudes higher than found in single-phase materials. A rapidly emerging research space in multiferroics is the development of miniature wireless devices, such as antennas and energy harvesters, taking advantage of the efficient flux-to-voltage conversion of multiferroics. In this talk, I will present work showing the impact of multiferroic coupling on the ferromagnetic resonance in GHz Bulk Acoustic Wave resonators, as well as investigations in frequency mixing from non-linear multiferroic affects. These results are all in support of our goal create a microscale multiferroic antenna that is orders of magnitude more efficient than its classical antenna counterpart.
Furthermore, continued miniaturization of existing and emerging components that use magnets (atomic clocks, quantum computing, magnetic memory) will increase their sensitivity to external magnetic fields as well as the crosstalk between components. To address this need, we are developing techniques for on-chip magnetic shielding using multiple layers of permalloy. We will present recent results showing microscale magnetic shields fabricated by electroplating multiple permalloy layers into molds, as well as milliscale shields that were conformally electroplated on 3D printed sheaths.