| AVS 65th International Symposium & Exhibition | |
| MEMS and NEMS Group | Thursday Sessions |
| Session MN+2D+AN+NS-ThA |
| Session: | Nonlinear and Thermal Resonators |
| Presenter: | Jana Huber, University of Konstanz, Germany |
| Authors: | J. Huber, University of Konstanz, Germany E.M. Weig, University of Konstanz, Germany |
| Correspondent: | Click to Email |
Doubly-clamped pre-stressed silicon nitride string resonators excel as high Q nanomechanical systems enabling room temperature quality factors of several 100,000 in the 10 MHz eigenfrequency range when operated under vacuum conditions. To retain the high mechanical quality factor, dielectric transduction is implemented as an all-electrical control scheme avoiding the metallization of the string. To this end, the string is exposed to an inhomogeneous electric field created between adjacent electrodes. The resulting gradient field provides an ideal platform for actuation, displacement detection, frequency tuning as well as strong mode coupling between the in- and out-of-plane modes of the string.
Here we focus on the nonlinear dynamics of the string subject to a strong drive. As a result of the high quality factor, cubic as well as higher order nonlinearities are observed. In the presence of thermal fluctuations, satellite resonances arise which enable deep insights into fundamental properties of the system.