Auger Electron Spectroscopy (AES) is a very power surface sensitive technique used for determining the composition of micron and sub-micron sized features, as well as for general thin film analysis. Its application has found widespread use in various fields of study such as semiconductors, microelectronics, metallurgy, fracture analysis, corrosion, catalysis, thin film coatings, and failure analysis. While Auger by itself can solve many problems, at times, the combination of other techniques with Auger can provide complementary data useful for more complete characterization of materials. This presentation will describe PHI’s 710 Multi-technique instrument with Auger, EDS, EBSD, BSE and FIB capabilities. Applications of each technique will be shown, demonstrating how the instrument can be used for advanced materials characterization.