AVS 65th International Symposium & Exhibition
    Exhibitor Technology Spotlight Workshops Tuesday Sessions
       Session EW-TuB

Paper EW-TuB2
IMPULSE HIPIMS Power Supply with Positive Pulse Option Advantages

Tuesday, October 23, 2018, 10:20 am, Room Hall A

Session: Exhibitor Technology Spotlight Session I
Presenter: Jason Hrebik, Kurt J. Lesker Company
Correspondent: Click to Email
HIPIMS is an ionized PVD technique that produces a high density, high performance films. The extreme power densities in HIPIMS create a higher ionized plasma that creates a very high energy of material being deposited onto the substrate.

The IMPULSE HIPIMS supply offers a cost effective solution for HIPIMS research and process development. The IMPULSE is a scalable option for higher power applications ideal for production application scale up.

The supplies broad range of parameter adjustment along with its positive kick pulse option, provide the tools necessary to tune each process for ideal performance. This presentation will share examples of applications and performance data to support the many advantages of the IMPULSE power supply. The available configurations and examples of ideal operating parameters will be shared.