| AVS 65th International Symposium & Exhibition | |
| Electronic Materials and Photonics Division | Thursday Sessions |
| Session EM-ThP |
| Session: | Electronic Materials and Photonics Division Poster Session |
| Presenter: | Alandria Henderson, Alabama A&M University |
| Authors: | A. Henderson, Alabama A&M University J. Kimbrough, Alabama A&M University Z. Duncan, Alabama A&M University K. Davis, Alabama A&M University M. Howard, Alabama A&M University J. Elike, Alabama A&M University T. Wimbley, Alabama A&M University M. Glenn, Alabama A&M University Z. Xiao, Alabama A&M University |
| Correspondent: | Click to Email |
We report the growth of nanoscale multilayered thermoelectric thin films and fabrication of integrated thermoelectric devices for high-efficiency energy conversion and solid-state cooling. Nanoscale multilayered thin films such as Sb/Sb2Te3 and Te/Bi2Te3 thin films were grown using the e-beam evaporation. Integrated thermoelectric devices were fabricated with the nanoscale multilayered thin films using the clean room-based microfabrication techniques such as UV lithography. X-ray diffraction and reflection and high-resolution tunneling electron micrograph (HR-TEM) were used to analyzed the e-beam-grown nanoscale multilayered thin films. SEM was used to image and analyze the fabricated devices. The thermoelectric characteristics of the fabricated devices were measured and analyzed, and highly-efficient thermoelectric thin-film materials and integrated devices will be demonstrated and reported.