AVS 65th International Symposium & Exhibition
    Electronic Materials and Photonics Division Thursday Sessions
       Session EM-ThP

Paper EM-ThP4
Growth and Magneto-optical Properties of ZnO/Zn1-xMnxO Thin Films on Si Substrates

Thursday, October 25, 2018, 6:00 pm, Room Hall B

Session: Electronic Materials and Photonics Division Poster Session
Presenter: Da-Ren Liu, ITRC,NARL,Taiwan, Republic of Korea
Authors: D.R. Liu, ITRC,NARL,Taiwan, Republic of Korea
C.-J. Weng, ITRC,NARL, Taiwan, Republic of Korea
Correspondent: Click to Email
ZnMnO is one of the most promising diluted magnetic semiconductors (DMS) materials due to its predicted above room temperature ferromagnetism. In this study, ZnO layer was conformally deposited on the Si substrates by atomic layer deposition (ALD). Then the Zn1-xMnxO (0.01 < x < 0.10) coatings were grown on ZnO layer by Nd:YAG pulsed laser deposition (PLD). The thickness and roughness of the films were characterized by grazing-incidence x-ray reflectivity (GIXR). According to the results of high-resolution x-ray diffraction, the ZnO/ Zn1-xMnxO thin films are polycrystalline with a preferential growth direction of (002). The surface and cross-section morphologies of films were analyzed by the field-emission scanning electron microscope (FE-SEM). Photoluminescence spectra demonstrate ultraviolet emission peaks which have shift with the increase of Mn ion concentration. The temperature-dependent magnetization (M-T) curves of the ZnO/ Zn1-xMnxO thin films were measured by a superconducting quantum interference device (SQUID) magnetometer and the magneto-optical properties were measured by micro-MOKE spectroscopy. The results show the room temperature ferromagnetism of the ZnO/ Zn1-xMnxO thin films suggested that the possibility for the application to diluted magnetic semiconductors.