| AVS 65th International Symposium & Exhibition | |
| Applied Surface Science Division | Tuesday Sessions |
| Session AS-TuA |
| Session: | The Impact of Modeling (Ion, Electron) and Data Analysis on Applied Surface Science, a Celebration of the Career of Barbara Garrison |
| Presenter: | Lucille Giannuzzi, L.A. Giannuzzi & Associates LLC |
| Correspondent: | Click to Email |
Many FIB techniques in sample preparation and prototyping have been developed with a knowledge and use of ion-solid interactions modeling and theory. Understanding ion-solid interactions at different incident angle, ion energy, dose, and effect of target crystallography, are crucial for quality FIB milling of materials [1,2]. A discussion on the modeling and theory of ion-solid interactions and its direct influence on FIB milling quality and results will be presented.
[1]Lucille A. Giannuzzi, Remco Geurts, and Jan Ringnalda,Microsc Microanal 11(Suppl 2), 828-829, 2005
[2]Michael F. Russo, Jr., Mostafa Maazouz, Lucille A. Giannuzzi, Clive Chandler, Mark Utlaut, and Barbara J. Garrison, Microsc. Microanal. 14, 315–320, 2008