| AVS 65th International Symposium & Exhibition | |
| Applied Surface Science Division | Wednesday Sessions |
| Session AS+NS+SA-WeM |
| Session: | Beyond Traditional Surface Analysis |
| Presenter: | Olivier Renault, CEA/LETI-University Grenoble Alpes, France |
| Authors: | O.J. Renault, CEA/LETI-University Grenoble Alpes, France C. Zborowski, University of Southern Denmark J.-P. Rueff, Synchrotron SOLEIL, L'orme des Merisiers, France Y. Yamashita, NIMS, Japan S. Ueda, NIMS, Japan G.A. Grenet, Lyon Institute of Nanotechnology, France S. Tougaard, University of Southern Denmark |
| Correspondent: | Click to Email |
X-ray photoelectron spectroscopy (XPS) has become a mature technique with a widespread use spanning from fundamental research to R&D labs. In parallel, the intrinsic complexity of materials and systems to be analyzed by XPS has increased. Some of the limitation of XPS are of concern if a non-destructive, non-invasive analytical protocol is the key issue. These are, especially, the poor lateral resolution and the poor bulk sensitivity, making impossible the analysis of microscopic features and buried interfaces in a reliable way.
In this contribution, we review the capabilities of current and novel techniques to get into: (i) high lateral resolution and quantitative micro-analysis using spectroscopic imaging implemented by X-ray PhotoElectron Emission Microscopy (XPEEM); (ii) high depth sensitivity offered by Hard X-ray Photoelectron Spectroscopy (HAXPES), coupled or not with inelastic background analysis to futher enhance information depth up to nearly 100 nm.
We will highlight the capabilities of each techniques by different practical examples in the field of 2D materials [1] and device technology [2, 3], emphasizing particularly the perspectives offered by novel laboratory hard X-ray sources [4].
[1] H. Kim, O. Renault et al., Physical Review B, 2016. 94(8): p. 081401.
[2] P. Risterucci, O. Renault et al., Applied Surface Science, 2017, 402: p. 78-85.
[3] C. Zborowski, et al., Applied Surface Science, 2018. 432(Part A): p. 60-70.
[4] O. Renault, E. Martinez, et al., Surf. Interface Anal. 2018 (in press).