| AVS 65th International Symposium & Exhibition | |
| Extending Additive Manufacturing to the Atomic Scale Focus Topic | Wednesday Sessions |
| Session AM+NS+SS-WeM |
| Session: | Nanofabrication with Focused Electron Beams (8:00-10:00 am)/Atomic Scale Manipulation with Focused Electron Beams (11:00 am-12:20 pm) |
| Presenter: | Harald Plank, Graz University of Technology, Austria |
| Authors: | H. Plank, Graz University of Technology, Austria R. Winkler, Graz University of Technology, Austria J. Sattelkow, Graz University of Technology, Austria J.D. Fowlkes, Oak Ridge National Laboratory P.D. Rack, University of Tennessee Knoxville |
| Correspondent: | Click to Email |
3D-printing of functional structures has emerged as an important technology in research and development. While being reliable on the micro and sub-micron scale, the extension to the nanoscale is still a challenging task. Among the very few direct-write techniques on that scale, focused electron beam induced deposition (FEBID) is one of the promising candidates as this technology allows fabrication of functional nano-structures on almost any material and substrate morphology in a single-step process. Based on strong fundamental progress in recent years, FEBID was demonstrated to be capable of fabricating complex, freestanding 3D nano-architectures with individual branch diameters down to 20 nm. Together with the increasing availability of precursors with different functionalities, FEBID is advancing from a versatile research tool into a predictable and reliable 3D nano-printer, which opens up new opportunities for advanced applications.
In this contribution, we start with the basic principles of 3-dimensional printing via FEBID, complemented by simulations for deeper insight into the fundamental processes that are operative. In the following, we present a variety of 3BID based proof-of-principle studies to demonstrate the capabilities of this direct-write technology. This ranges from scientifically oriented applications, such as plasmonics, magnetics and nano-mechanics toward industrially relevant concepts for scanning probe microscopy related tip fabrication, such as electrical, thermal and optical 3D nano-probes. Finally, we overview some of the remaining challenges and provide an outlook on future activities.