| AVS 64th International Symposium & Exhibition | |
| Vacuum Technology Division | Tuesday Sessions |
| Session VT+MN-TuA |
| Session: | Pumping |
| Presenter: | Marcy Stutzman, Thomas Jefferson National Accelerator Facility |
| Authors: | M.L. Stutzman, Thomas Jefferson National Accelerator Facility P.A. Adderley, Thomas Jefferson National Accelerator Facility M. Poelker, Thomas Jefferson National Accelerator Facility |
| Correspondent: | Click to Email |
Non-evaporable getter (NEG) thin films are typically applied to uniform diameter tubes, such as used for accelerator beamlines. We have been extending the successful application of NEG coating to larger diameter and non-uniform chambers, such as the 36 and 41 cm diameter chambers for the Jefferson Lab polarized electron source, as well as atom trap chambers for MIT and JILA. We show that by combining the NEG coating with a small ion pump to handle the non-reactive gasses, the chamber can reach the low 10-12 Torr range, and adding additional NEG pumping yields extreme high vacuum (XHV), with measured pressure below 8x10-13 Torr. With this demonstration of a reliable and reproducible method to achieve room temperature XHV, we hope to demonstrate the benefits of NEG coated chambers beyond accelerator physics applications to other fields of physics and materials research.