AVS 64th International Symposium & Exhibition
    Plasma Science and Technology Division Tuesday Sessions
       Session PS+SS-TuA

Paper PS+SS-TuA3
The Long Quest to Understand Etch Mechanisms and Surface Science: The Legacy of Harold Winters and its Impact on Semiconductor Industry

Tuesday, October 31, 2017, 3:00 pm, Room Ballroom B

Session: The Science of Plasmas and Surfaces: Commemorating the Career of Harold Winters (ALL INVITED SESSION)
Presenter: Sebastian Engelmann, IBM Research Division, T.J. Watson Research Center
Authors: S.U. Engelmann, IBM Research Division, T.J. Watson Research Center
N.C.M. Fuller, IBM Research Division, T.J. Watson Research Center
Correspondent: Click to Email

From the beginning of its days in semiconductor industry until now, Harold Winters work has very big impact to plasma processes and surface science. Starting with his landmark papers in the 1970’s and 1980’s, much scientific work was inspired by his publications. At IBM itself and industry-wide, many projects were impacted by his work. We will present our view on some of these topics as well as the lasting technological impact that Harold’s work had and it inspired.