AVS 64th International Symposium & Exhibition
    Plasma Science and Technology Division Wednesday Sessions
       Session PS+NS+SS-WeM

Paper PS+NS+SS-WeM13
Microplasma Spray Deposition of Metal Oxide Nanostructures for Energy Applications

Wednesday, November 1, 2017, 12:00 pm, Room 22

Session: Plasma Processing for Nanomaterials & Nanoparticles
Presenter: Katherine Mackie, University of California at Santa Barbara
Authors: K.E. Mackie, University of California at Santa Barbara
M.J. Gordon, University of California at Santa Barbara
Correspondent: Click to Email
A general, substrate-independent method for plasma deposition of nanostructured, crystalline metal oxides is presented. The technique uses a flow-through, micro-hollow cathode plasma discharge (supersonic microplasma jet) with remote anode to deliver a highly-directed flux of growth species to the substrate. A diverse range of nanostructured materials (e.g., CuO, α-Fe2O3, and NiO) can be deposited on any room temperature surface, e.g., conductors, insulators, plastics, fibers, and patterned surfaces, in a conformal fashion. The effects of deposition conditions, substrate type, and patterning on film morphology, nanostructure, and surface coverage will be highlighted. Energy storage application examples to be discussed include NiO on carbon for supercapacitors and CuO for conversion-type Li-ion batteries. The synthesis approach presented herein provides a general and tunable method to deposit a variety of functional and hierarchical metal oxide materials on many different surfaces.