AVS 64th International Symposium & Exhibition | |
Plasma Science and Technology Division | Friday Sessions |
Session PS+NS+SS+TF-FrM |
Session: | Atomic Layer Etching II |
Presenter: | Scott Walton, Naval Research Laboratory |
Authors: | S.G. Walton, Naval Research Laboratory D.R. Boris, Naval Research Laboratory S.C. Hernández, Naval Research Laboratory S.G. Rosenberg, ASEE Postdoctoral Fellow, NRL H. Miyazoe, IBM T.J. Watson Research Center A.V. Jagtiani, IBM T.J. Watson Research Center S.U. Engelmann, IBM T.J. Watson Research Center E.A. Joseph, IBM T.J. Watson Research Center |
Correspondent: | Click to Email |